Ultrasonic Flow Meters
high accuracy, stable measurement.
 
DSP vs. Analogue
Advanced signal processing with DSP (Digital Signal Processor) enables accurate and stable flow measurement
​even in bubbly environment.

HLF Series

Specially programmed Digital Signal Processor (DSP) enables stable measurement even under critical conditions
2-channel measurement made possible in 1 unit 
Easy Installation with detachable sensor
Low Pressure Loss (no moving mechanism)
Body made with latest PFA, ensuring wide compatibility for various fluids
Compliant to EMS Regulation (EN61326) and ROHS               
Choice of models: With or Without Display
PC monitoring is possible by RS-485 communication

High Temperature
​Chemical-Resistant

Good Readability
​by VFD

PC
Monitoring

Application
​Examples
All contacting surface to the measuring liquid is made by chemical resistant NEW PFA. Genuine sel-developed ceramics element realizes the use in high temperature liquid up to 200 deg C (K type).
VFD (Vacuum Fluorescent Display) gives very good readability in limited installation space (HLF820).
"HLF800 monitor" is supplied for PC monitoring. Install the software to Windows PC and it controls the parameter setting and monitors the measurement data via RS-485 communication.
  • Flow measurement of DIW or ultrapure water for the semiconductor manufacturing process
  • Flow control of high corrosive chemical liquid
  • Flow control of slurry liquid for CMP (Chemical Mechanical Polishing)

Fitting 2 Sensors to 1 Unit

Detachable Cable for Easy Installation
Realizes good space factor and cost effectivity by controlling two sensors in one main unit. Different chemical, different size measurement is possible.
Sensor cable can be detached from the sensor unit, so the installation of the sensor unit is easily done without cable. The cable length can be selected fro 5 or 7 meters.